期刊論文 | 研討會論文 | 專利 | 專書

期刊論文

1. Ming-Cheng Cheng, Wei-Gei Ho, Chin-Piao Chang, Wei-Sheh Huang, Ruey-Shing Huang " Ultra low stress silicon-rich nitride films for micro structure fabrication " Sensors and Materials. 11, 349-358, (1999)
2. J. H. Babaei, C. Y. Kwok and R. S. Huang, "An integrable nozzle for monolithic microfluidic devices", Sensor and Actuators, A 65, 221-227, (1998)
3. K.M. Lin, C.Y. Kwok and R.S. Huang, "A strontium titanate thermo-capacitive floating-gate MOS flow sensor", Sensors and Materials, 9, 131-139, (1997)
4. K.M. Lin, C.Y. Kwok and R.S. Huang, "A modified MOS IC process suitable for bulk micromachining", Journal of Micromechanics and Microengineering, 6, 236-239, (1996)
5. K.M. Lin, C.Y. Kwok and R.S. Huang, "A silicon thermocapacitive flow sensor with frequency modulated output", Sensors and Actuators, 57A, 35-39 (1996)
6. K.M. Lin, C.Y. Kwok and R.S. Huang, "An integrated thermo-capacitive type MOS flow sensor", IEEE Electron Device Letters, 17, 247-249, (1996)

研討會論文

1. M. C. Cheng, C. P. Chang, W. S. Huang, R. S. Huang, C. Chany, P. Chang "Process integration for micromachined deformable micromirror batch fabrication " The 14 th European Conference on solid-state Transducers, 27-30 August. Copenhagen, Denmark (2000)
2. R. S. Huang, W. Fang, I-Yu Huang "Establishment and achievements of NSC central regional MEMS research center in taiwan" The International Conference on Electrial Engineering 2000, July 24-28, Kitakyushu, Japan (2000)
3. I-Yu Huang, R. S. Huang " A PH sensor with integrated planar reference electrode " Transducers ’99, The 10 th International Conference on Solid-state Sensors and Actuators, June 7-10, Sendai, Japan (1999)
4. Ming-Cheng Cheng, Wei-Gei Ho, Chin-Piao Chang, Wei-Sheh Huang, Ruey-Shing Huang " Ultra low stress silicon-rich nitride films for micro structure fabrication " Microelectronics and Micro-Electro Mechanical Systems Micro / MEMS ’99, 27-29 Oct. 1999, Quensland, Australia (1999)
5. M. S. Lin, R. S. Huang, "MEMS in Taiwan-1998 status", 4th world micromachine summit, 29 April-1 May, Melbourne, Australia (1998)
6. M. S. Lin, R. S. Huang, C. Y. Wu, C. K. Chung, "Recent progress of MEMS and sensor in Taiwan", 16th sensor symposium, June Japan, (1998)
7. C. L. Chang, P. Z. Chang, R. S. Huang, C. P. Chang, M. C. Cheng, "Micro electrode array-A new method for the design of electrostatic micro actuators and capacitive micro sensors" SPIE proceeding, 3242, 145-156, (1997)
8. J. Haji-Babaei, C-Y. Kwok and R. S. Huang, "Buckling behavior of electrostatically actuated doubly-supported beams", Eurosensors XI, 1583-1586 warsaw, poland, Sep 21-24, (1997)
9. J. Haji-Babaei, C-Y. Kwok and R. S. Huang, "Integrable active microvalue with surface micromachined curled-up actuator", Transducers' 97, 833-836 chicago, June 19-6-19, (1997)
10. K.M. Lin, C.Y. Kwok and R.S. Huang, (invited) "A CMOS compatible micro-machined thermo-capacitive flow sensor," To appear in International Electron Devices and Material Symposia, December 16-20, Hsinchu, Taiwan, 1996.
11. M.S. Lin, C.Y. Wu and R.S. Huang, "Research and development activities of micro-elctromechanical system (MEMS) in Taiwan," Second MMC conference, Tokyo, Janpan, 1996.
     

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